TY - GEN
T1 - Numerical analysis of ion dynamics in RF ICP discharge
AU - Nishida, K.
AU - Mattei, S.
AU - Kobayashi, W.
AU - Lettry, J.
AU - Hatayama, A.
N1 - Publisher Copyright:
© 2018 Author(s).
PY - 2018/9/21
Y1 - 2018/9/21
N2 - We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.
AB - We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.
UR - http://www.scopus.com/inward/record.url?scp=85054192699&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85054192699&partnerID=8YFLogxK
U2 - 10.1063/1.5053312
DO - 10.1063/1.5053312
M3 - Conference contribution
AN - SCOPUS:85054192699
SN - 9780735417274
T3 - AIP Conference Proceedings
BT - Proceedings of the 17th International Conference on Ion Sources
A2 - Mahner, Edgar
A2 - Scrivens, Richard
A2 - Pardo, Richard
A2 - Lettry, Jacques
A2 - Marsh, Bruce
PB - American Institute of Physics Inc.
T2 - 17th International Conference on Ion Sources 2018
Y2 - 15 September 2017 through 20 September 2017
ER -