We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.
|Proceedings of the 17th International Conference on Ion Sources
|Edgar Mahner, Richard Scrivens, Richard Pardo, Jacques Lettry, Bruce Marsh
|American Institute of Physics Inc.
|Published - 2018 9月 21
|17th International Conference on Ion Sources 2018 - Geneva, Switzerland
継続期間: 2017 9月 15 → 2017 9月 20
|AIP Conference Proceedings
|17th International Conference on Ion Sources 2018
|17/9/15 → 17/9/20
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