抄録
Diamond was deposited by the microwave plasma chemical vapor deposition method on a Si(100) substrate on which graphite flakes had been spread with their basal planes parallel to the substrate before deposition. Before diamond deposition, the substrate was preheated at 1200°C under hydrogen at 60 Torr to clean the surface of graphite flakes. Scanning electron micrographs showed that most of diamond particles were cubo-octahedral in morphology. The {111} planes of some diamond particles, which were judged by their triangular shape, were often parallel to the (0001) plane of graphite. Furthermore, some 〈111〉-oriented diamond particles were clearly nucleated at the edge of graphite. The possibility of heteroepitaxy of diamond on graphite was discussed based on crystallographic considerations.
本文言語 | English |
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ページ(範囲) | 540-542 |
ページ数 | 3 |
ジャーナル | Applied Physics Letters |
巻 | 65 |
号 | 5 |
DOI | |
出版ステータス | Published - 1994 |
外部発表 | はい |
ASJC Scopus subject areas
- 物理学および天文学(その他)