Out-of-plane actuation with a sub-micron initial gap for reconfigurable terahertz micro-electromechanical systems metamaterials
Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama
研究成果: Article › 査読
20
被引用数
(Scopus)