Oxidation-enhanced Si self-diffusion in isotopically modulated silicon nanopillars
Ryotaro Kiga, Sayaka Hayashi, Satoru Miyamoto, Yasuo Shimizu, Yasuyoshi Nagai, Tetsuo Endoh, Kohei M. Itoh
研究成果: Article › 査読
7
被引用数
(Scopus)