Oxidation-enhanced Si self-diffusion in isotopically modulated silicon nanopillars
- Ryotaro Kiga
- , Sayaka Hayashi
- , Satoru Miyamoto
- , Yasuo Shimizu
- , Yasuyoshi Nagai
- , Tetsuo Endoh
- , Kohei M. Itoh
研究成果: Article › 査読
7
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(Scopus)