TY - JOUR
T1 - Oxidation resistance and hardness of TiAlSiN/CrAlYN multilayer films deposited by the arc ion plating method
AU - Mori, T.
AU - Noborisaka, M.
AU - Watanabe, T.
AU - Suzuki, T.
PY - 2012/12
Y1 - 2012/12
N2 - Multilayered TiAlSiN/CrAlYN films were synthesized on cemented carbide, silicon and SUS304 substrates with various periods and investigated their oxidation resistance and hardness. The multilayer period between 5.6. nm and 23.2. nm was obtained by controlling the rotation speed of the substrates. X-ray diffraction patterns showed that the TiAlSiN/CrAlYN multilayer films after annealed at 1000. °C for 1. h retained the nitride structure and no peaks indicating metal oxide were observed for the films. Using the glow discharge optical emission spectrometry depth profiling method, an oxidation peak was only observed around the film surface. Hardness of TiAlSiN/CrAlYN multilayer films was measured using a conventional micro-Vickers hardness tester and the result showed that it changed depending on the multilayer period. That is, the film with a period of 8.7. nm exhibited the highest hardness with 37.1. GPa, which was higher than the value calculated based on the rule of mixtures of TiAlSiN monolayer and CrAlYN monolayer.
AB - Multilayered TiAlSiN/CrAlYN films were synthesized on cemented carbide, silicon and SUS304 substrates with various periods and investigated their oxidation resistance and hardness. The multilayer period between 5.6. nm and 23.2. nm was obtained by controlling the rotation speed of the substrates. X-ray diffraction patterns showed that the TiAlSiN/CrAlYN multilayer films after annealed at 1000. °C for 1. h retained the nitride structure and no peaks indicating metal oxide were observed for the films. Using the glow discharge optical emission spectrometry depth profiling method, an oxidation peak was only observed around the film surface. Hardness of TiAlSiN/CrAlYN multilayer films was measured using a conventional micro-Vickers hardness tester and the result showed that it changed depending on the multilayer period. That is, the film with a period of 8.7. nm exhibited the highest hardness with 37.1. GPa, which was higher than the value calculated based on the rule of mixtures of TiAlSiN monolayer and CrAlYN monolayer.
KW - Arc ion plating
KW - Hardness
KW - Oxidation resistance
KW - TiAlSiN/CrAlYN multilayer
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U2 - 10.1016/j.surfcoat.2012.10.050
DO - 10.1016/j.surfcoat.2012.10.050
M3 - Article
AN - SCOPUS:84870182721
SN - 0257-8972
VL - 213
SP - 216
EP - 220
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -