TY - GEN
T1 - Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy
AU - Jung, Uijin
AU - Kuwana, Kenta
AU - Takahashi, Hidetoshi
AU - Kan, Tetsuo
AU - Takei, Yusuke
AU - Noda, Kentaro
AU - Iwase, Eiji
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2010/6/1
Y1 - 2010/6/1
N2 - This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.
AB - This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.
UR - http://www.scopus.com/inward/record.url?scp=77952779644&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77952779644&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2010.5442435
DO - 10.1109/MEMSYS.2010.5442435
M3 - Conference contribution
AN - SCOPUS:77952779644
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 588
EP - 591
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -