Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shape of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.
|出版ステータス||Published - 2009|
|イベント||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan|
継続期間: 2009 12月 2 → 2009 12月 4
|Other||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009|
|Period||09/12/2 → 09/12/4|
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