Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element

Ryo Oda; Rihachiro Nakashima; Hidetoshi Takahashi

Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element

Ryo Oda
, Rihachiro Nakashima
, Hidetoshi Takahashi

機械工学科

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

This paper reports on a pressure sensor with a corrugated structure utilizing a laser-induced graphene (LIG) strain gauge. A concentrically expanding corrugated structure is formed on a polyimide (PI) film by a UV laser. A LIG layer, which function as a piezoresistor, is directly formed by a CO₂ laser to the outermost circumference of the corrugated structure. Using two different-types laser processing, a highly sensitive pressure sensor is easily realized. Here we theoretically and experimentally show the proposed method usefulness by evaluating the sensor response.

本文言語	English
ホスト出版物のタイトル	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	1601-1603
ページ数	3
ISBN（電子版）	9784886864352
出版ステータス	Published - 2023
イベント	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan 継続期間: 2023 6月 25 → 2023 6月 29

出版物シリーズ

名前	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
国/地域	Japan
City	Kyoto
Period	23/6/25 → 23/6/29

ASJC Scopus subject areas

コンピュータサイエンスの応用
電子工学および電気工学
制御と最適化
器械工学

他のファイルとリンク

引用スタイル

Oda, R., Nakashima, R., & Takahashi, H. (2023). Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 1601-1603). (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023). Institute of Electrical and Electronics Engineers Inc..

Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. / Oda, Ryo; Nakashima, Rihachiro; Takahashi, Hidetoshi.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 1601-1603 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

研究成果: Conference contribution

Oda, R, Nakashima, R & Takahashi, H 2023, Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Institute of Electrical and Electronics Engineers Inc., pp. 1601-1603, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, Japan, 23/6/25.

Oda R, Nakashima R, Takahashi H. Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 1601-1603. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Oda, Ryo ; Nakashima, Rihachiro ; Takahashi, Hidetoshi. / Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 1601-1603 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

@inproceedings{c02589e7a05f45f89aa88769872fa2c9,

title = "Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element",

abstract = "This paper reports on a pressure sensor with a corrugated structure utilizing a laser-induced graphene (LIG) strain gauge. A concentrically expanding corrugated structure is formed on a polyimide (PI) film by a UV laser. A LIG layer, which function as a piezoresistor, is directly formed by a CO2 laser to the outermost circumference of the corrugated structure. Using two different-types laser processing, a highly sensitive pressure sensor is easily realized. Here we theoretically and experimentally show the proposed method usefulness by evaluating the sensor response.",

keywords = "Corrugated structure, Laser-induced graphene, Pressure sensor",

author = "Ryo Oda and Rihachiro Nakashima and Hidetoshi Takahashi",

note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

year = "2023",

language = "English",

series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1601--1603",

booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

}

TY - GEN

T1 - Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element

AU - Oda, Ryo

AU - Nakashima, Rihachiro

AU - Takahashi, Hidetoshi

PY - 2023

Y1 - 2023

N2 - This paper reports on a pressure sensor with a corrugated structure utilizing a laser-induced graphene (LIG) strain gauge. A concentrically expanding corrugated structure is formed on a polyimide (PI) film by a UV laser. A LIG layer, which function as a piezoresistor, is directly formed by a CO2 laser to the outermost circumference of the corrugated structure. Using two different-types laser processing, a highly sensitive pressure sensor is easily realized. Here we theoretically and experimentally show the proposed method usefulness by evaluating the sensor response.

AB - This paper reports on a pressure sensor with a corrugated structure utilizing a laser-induced graphene (LIG) strain gauge. A concentrically expanding corrugated structure is formed on a polyimide (PI) film by a UV laser. A LIG layer, which function as a piezoresistor, is directly formed by a CO2 laser to the outermost circumference of the corrugated structure. Using two different-types laser processing, a highly sensitive pressure sensor is easily realized. Here we theoretically and experimentally show the proposed method usefulness by evaluating the sensor response.

KW - Corrugated structure

KW - Laser-induced graphene

KW - Pressure sensor

UR - https://www.scopus.com/pages/publications/85176724965

UR - https://www.scopus.com/pages/publications/85176724965#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:85176724965

T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

SP - 1601

EP - 1603

BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Y2 - 25 June 2023 through 29 June 2023

ER -

Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element

抄録

出版物シリーズ

Conference

ASJC Scopus subject areas

他のファイルとリンク

フィンガープリント

引用スタイル