Pulsed-Heating System With an Integrated Metal-Oxide Sensor Array Scheming Low-Power Temperature Modulation

Yohsuke Shiiki, Shintaro Nagata, Shoo Saga, Yi Tan, Tsunaki Takahashi, Takeshi Yanagida, Hiroki Ishikuro

研究成果: Article査読

抄録

Sensor integration and low-power operation are required to collect different molecular information. However, it is challenging to integrate different types of sensors onto a single chip. To obtain multiple molecular information, temperature modulation of metal-oxide gas sensors is highly effective since it allows for the variation in sensor molecular sensitivity based on the operating temperature. This article covers a proposed novel system using metal-oxide gas sensors. The temperatures of the sensors are controlled by adopting self-heated sensors, which achieve local temperature increase and low-power operation. To simultaneously heat multiple sensors, we implemented a printed circuit board (PCB) for pulsed-heating scheme and streamlined intended input power with a proportional–integral–derivative (PID) controller. The performance of the implemented circuit is evaluated, and a maximum error rate of 1.7% of heating accuracy and 0.68% of average readout accuracy is ensured. As a proof-of-concept of the proposed gas sensory system, an array of 16 self-heated sensors was fabricated on a chip and tested with reactive gas molecules. The PID controller set the input power in 8 ms and kept constant power while sensor resistance changed. The proposed pulsed-heating measurement and conventional continuous-heating measurement were experimentally compared. The results of the experimental comparison suggest that while the sensitivity of the proposed pulsed-heating measurement decreases slightly, the power consumption due to heating can be reduced by up to 1/16.

本文言語English
ページ(範囲)20794-20804
ページ数11
ジャーナルIEEE Sensors Journal
24
13
DOI
出版ステータスPublished - 2024 7月 1

ASJC Scopus subject areas

  • 器械工学
  • 電子工学および電気工学

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