@inproceedings{1ad380815816425e92d9aac9bd625927,
title = "Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method",
abstract = "This paper reports a quad-axial force sensor probe which can measure tri-axial forces and one torque around the probe. By forming piezoresistors three dimensionally on the probe supporting beams, four sensing element can detect quad-axial force/torque on the probe tip. We demonstrated that the fabricated sensor had condition number of 2.6 with force resolutions under 1.0 μN and torque resolution under 1.0 nNm.",
keywords = "Force sensor, Multi-axis, Piezoresistive, Probe",
author = "Hidetoshi Takahashi and S. Hirakawa and T. Takahata and K. Matsumoto and I. Shimoyama",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181116",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1089--1092",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
note = "18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
}