Selective dissociative ionization of sih4, si2h6and si3h8by electron impact in supersonic free jets

Teruaki Motooka; Paul Fons; Hiroshi Abe; Takashi Tokuyama

doi:10.1143/JJAP.32.L879

Selective dissociative ionization of sih₄, si₂h₆and si₃h₈by electron impact in supersonic free jets

Teruaki Motooka, Paul Fons, Hiroshi Abe, Takashi Tokuyama

研究成果: Article › 査読

6 被引用数 (Scopus)

抄録

Low-energy (E=10-14 eV) electron-impact decomposition of SiH₄, Si₂H₆, and Si₃H₈into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si⁺was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH₂⁺and SiH₃⁺became the primary species in the dissociation of SiH₄and Si₂H₆, respectively.

本文言語	English
ページ（範囲）	L879-L882
ジャーナル	Japanese journal of applied physics
巻	32
号	6 B
DOI	https://doi.org/10.1143/JJAP.32.L879
出版ステータス	Published - 1993 6月
外部発表	はい

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

文献へのアクセス

10.1143/JJAP.32.L879

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引用スタイル

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title = "Selective dissociative ionization of sih4, si2h6and si3h8by electron impact in supersonic free jets",

abstract = "Low-energy (E=10-14 eV) electron-impact decomposition of SiH4, Si2H6, and Si3H8into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si+was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH2+and SiH3+became the primary species in the dissociation of SiH4and Si2H6, respectively.",

keywords = "Electron impact, Quadrupole mass spectrometry, Silicon, Supersonic free jet",

author = "Teruaki Motooka and Paul Fons and Hiroshi Abe and Takashi Tokuyama",

year = "1993",

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doi = "10.1143/JJAP.32.L879",

language = "English",

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T1 - Selective dissociative ionization of sih4, si2h6and si3h8by electron impact in supersonic free jets

AU - Motooka, Teruaki

AU - Fons, Paul

AU - Abe, Hiroshi

AU - Tokuyama, Takashi

PY - 1993/6

Y1 - 1993/6

N2 - Low-energy (E=10-14 eV) electron-impact decomposition of SiH4, Si2H6, and Si3H8into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si+was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH2+and SiH3+became the primary species in the dissociation of SiH4and Si2H6, respectively.

AB - Low-energy (E=10-14 eV) electron-impact decomposition of SiH4, Si2H6, and Si3H8into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si+was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH2+and SiH3+became the primary species in the dissociation of SiH4and Si2H6, respectively.

KW - Electron impact

KW - Quadrupole mass spectrometry

KW - Silicon

KW - Supersonic free jet

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