Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.
|出版ステータス||Published - 2007|
|イベント||4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan|
継続期間: 2007 11月 7 → 2007 11月 9
|Other||4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007|
|Period||07/11/7 → 07/11/9|
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