TY - JOUR
T1 - Sensitivity characteristics of a waterproof airflow sensor based on a MEMS piezoresistive cantilever and nanohole array
AU - Hirayama, Takuto
AU - Kazoe, Yutaka
AU - Takahashi, Hidetoshi
N1 - Funding Information:
This study was partially supported by JSPS KAKENHI Grant Nos. 20H02102, 22H00422, and 22K21355. This work was also partially supported by the New Energy and Industrial Technology Development Organization (NEDO).
Publisher Copyright:
© 2023 The Japan Society of Applied Physics
PY - 2023/2/1
Y1 - 2023/2/1
N2 - This paper presents the sensitivity characteristics of a microelectromechanical systems (MEMS) piezoresistive cantilever and nanohole array used in a waterproof airflow sensor. Previously, a Pitot tube-type waterproof airflow sensor was developed for seabird biologging. Built-in MEMS piezoresistive cantilevers are used as the differential pressure sensing elements. The waterproof function is achieved using nanohole arrays via Laplace pressure. However, the mechanism underlying sensitivity reduction when nanohole arrays are attached is unclear. Here, we experimentally and theoretically verified that the specific constant, which determines the airflow rate through the cantilever and nanohole array, affects sensitivity reduction. An airflow sensor with a small sensitivity reduction was achieved based on the calculated results using appropriate cantilever and nanohole arrays. We demonstrated that the proposed method for estimating sensitivity reduction is useful for designing waterproof airflow sensors using cantilever-type differential pressure sensor elements.
AB - This paper presents the sensitivity characteristics of a microelectromechanical systems (MEMS) piezoresistive cantilever and nanohole array used in a waterproof airflow sensor. Previously, a Pitot tube-type waterproof airflow sensor was developed for seabird biologging. Built-in MEMS piezoresistive cantilevers are used as the differential pressure sensing elements. The waterproof function is achieved using nanohole arrays via Laplace pressure. However, the mechanism underlying sensitivity reduction when nanohole arrays are attached is unclear. Here, we experimentally and theoretically verified that the specific constant, which determines the airflow rate through the cantilever and nanohole array, affects sensitivity reduction. An airflow sensor with a small sensitivity reduction was achieved based on the calculated results using appropriate cantilever and nanohole arrays. We demonstrated that the proposed method for estimating sensitivity reduction is useful for designing waterproof airflow sensors using cantilever-type differential pressure sensor elements.
KW - airflow sensor
KW - nano-hole array
KW - waterproof
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U2 - 10.35848/1347-4065/acb679
DO - 10.35848/1347-4065/acb679
M3 - Article
AN - SCOPUS:85148962241
SN - 0021-4922
VL - 62
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - 2
M1 - 026503
ER -