TY - GEN
T1 - Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators
AU - Wada, Ruka
AU - Takahashi, Hidetoshi
N1 - Funding Information:
This research was partially supported by Technova Award.
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - This paper reports an acoustic sensor using a Helmholtz resonator (HR) array and a MEMS differential pressure (DP) sensor element. A piezoresistive cantilever type DP sensor is highly sensitive to acoustic waves around its mechanical resonant frequency (RF). By attaching a HR array of which RF is equal to the cantilever in front of the DP sensor like a cap, the sensitivity is enhanced at the RF. The developed sensor with the HR responded with 3 times higher sensitivity than without the HR, and realized a resolution of approximately 2 mPa without an electrical lock-in filter.
AB - This paper reports an acoustic sensor using a Helmholtz resonator (HR) array and a MEMS differential pressure (DP) sensor element. A piezoresistive cantilever type DP sensor is highly sensitive to acoustic waves around its mechanical resonant frequency (RF). By attaching a HR array of which RF is equal to the cantilever in front of the DP sensor like a cap, the sensitivity is enhanced at the RF. The developed sensor with the HR responded with 3 times higher sensitivity than without the HR, and realized a resolution of approximately 2 mPa without an electrical lock-in filter.
KW - Acoustic sensor
KW - Helmholtz resonator array
KW - Piezoresitive cantilever
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U2 - 10.1109/MEMS51670.2022.9699840
DO - 10.1109/MEMS51670.2022.9699840
M3 - Conference contribution
AN - SCOPUS:85126394370
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 833
EP - 836
BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Y2 - 9 January 2022 through 13 January 2022
ER -