SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe

研究成果: Conference contribution

抄録

We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

本文言語English
ホスト出版物のタイトルConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
出版社Optica Publishing Group (formerly OSA)
ISBN(印刷版)9781509062904
出版ステータスPublished - 2017
イベントConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore
継続期間: 2017 7月 312017 8月 4

出版物シリーズ

名前Optics InfoBase Conference Papers
Part F122-CLEOPR 2017
ISSN(電子版)2162-2701

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
国/地域Singapore
CitySingapore
Period17/7/3117/8/4

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学

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