Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

Satoshi Hirao; Yuichiro Hayashi; Toshiaki Makabe

doi:10.1109/TPS.2008.924551

Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

Satoshi Hirao, Yuichiro Hayashi, Toshiaki Makabe

研究成果: Article › 査読

6 被引用数 (Scopus)

抄録

Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p₁) shows the temporal change of the active area for the plasma production as a function of time.

本文言語	English
ページ（範囲）	1410-1411
ページ数	2
ジャーナル	IEEE Transactions on Plasma Science
巻	36
号	4 PART 1
DOI	https://doi.org/10.1109/TPS.2008.924551
出版ステータス	Published - 2008 8月
外部発表	はい

ASJC Scopus subject areas

核物理学および高エネルギー物理学
凝縮系物理学

文献へのアクセス

10.1109/TPS.2008.924551

他のファイルとリンク

引用スタイル

@article{83f30b56b8894cba92ead60dc6c220b7,

title = "Space-and time-resolved E-H transition in an inductively coupled plasma in Ar",

abstract = "Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.",

keywords = "E-H transition, Inductively coupled plasmas(ICPs), Optical emission spectroscopy (OES)",

author = "Satoshi Hirao and Yuichiro Hayashi and Toshiaki Makabe",

year = "2008",

month = aug,

doi = "10.1109/TPS.2008.924551",

language = "English",

volume = "36",

pages = "1410--1411",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4 PART 1",

}

TY - JOUR

T1 - Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

AU - Hirao, Satoshi

AU - Hayashi, Yuichiro

AU - Makabe, Toshiaki

PY - 2008/8

Y1 - 2008/8

N2 - Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.

AB - Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.

KW - E-H transition

KW - Inductively coupled plasmas(ICPs)

KW - Optical emission spectroscopy (OES)

UR - http://www.scopus.com/inward/record.url?scp=50249136694&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50249136694&partnerID=8YFLogxK

U2 - 10.1109/TPS.2008.924551

DO - 10.1109/TPS.2008.924551

M3 - Article

AN - SCOPUS:50249136694

SN - 0093-3813

VL - 36

SP - 1410

EP - 1411

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 4 PART 1

ER -

Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

抄録

ASJC Scopus subject areas

文献へのアクセス

他のファイルとリンク

フィンガープリント

引用スタイル