TY - JOUR
T1 - Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses
AU - Tanabe, Takasumi
AU - Okamoto, Tatsuyoshi
AU - Kannari, Fumihiko
PY - 2003/9
Y1 - 2003/9
N2 - We demonstrate a novel method of material processing to create flexible periodic structures using temporal pulse shaping of ultrashort laser pulses and spectral interferometry. This scheme is based on the idea that the interferometric fringe pattern at a Fourier spectral plane can be varied by programming temporal amplitude, relative phase and the interval of two collinearly incident pulses. Various periodical patterns are formed on a silicon surface located at the Fourier plane with laser ablation.
AB - We demonstrate a novel method of material processing to create flexible periodic structures using temporal pulse shaping of ultrashort laser pulses and spectral interferometry. This scheme is based on the idea that the interferometric fringe pattern at a Fourier spectral plane can be varied by programming temporal amplitude, relative phase and the interval of two collinearly incident pulses. Various periodical patterns are formed on a silicon surface located at the Fourier plane with laser ablation.
KW - Acoustic optic phase dispersion filter (AOPDF)
KW - Femtosecond laser pulses
KW - Pulse shaping
KW - Short pulse ablation
KW - Spectral interferometry
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U2 - 10.1143/jjap.42.5594
DO - 10.1143/jjap.42.5594
M3 - Article
AN - SCOPUS:0344063418
SN - 0021-4922
VL - 42
SP - 5594
EP - 5597
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
IS - 9 A
ER -