Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo; Toshiaki Makabe; Shigeru Kakuta; Akira Suzuki

doi:10.1063/1.351137

Study of the structure of radio frequency glow discharges in CH₄ and H₂ by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo, Toshiaki Makabe, Shigeru Kakuta, Akira Suzuki

常任理事

研究成果: Article › 査読

51 被引用数 (Scopus)

抄録

Radio frequency discharges at 13.56 MHz in CH₄(100%), CH ₄(10%)/H₂, and H₂(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H₂ and CH₄ are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H _α and H₂(d³Π_u→a ³Σ_g⁺) in H₂ at 100 kHz.

本文言語	English
ページ（範囲）	2143-2150
ページ数	8
ジャーナル	Journal of Applied Physics
巻	71
号	5
DOI	https://doi.org/10.1063/1.351137
出版ステータス	Published - 1992

ASJC Scopus subject areas

物理学および天文学（全般）

文献へのアクセス

10.1063/1.351137

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引用スタイル

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abstract = "Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.",

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AU - Tochikubo, Fumiyoshi

AU - Makabe, Toshiaki

AU - Kakuta, Shigeru

AU - Suzuki, Akira

PY - 1992

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N2 - Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.

AB - Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.

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