Study on nano-graphitic carbon coating on Si mold insert for precision glass molding

Lin Zhang, Jiwang Yan

研究成果: Article査読

5 被引用数 (Scopus)


Precision glass molding is an efficient and promising technique for large-volume micro-optical manufacturing. Even though significant progress in precision glass molding has been achieved on the anti-adhesive coating, technical challenges and barriers still exist towards tailoring the coating layer to ensure durability and long-term processing consistency in numerous molding cycles. This manuscript presents a novel molding technique utilizing micro-patterned Si mold inserts coated with a newly developed nano-graphitic carbon coating as an isolation layer in high-precision glass molding. The coating is prepared by atmospheric pressure chemical vapor deposition (APCVD), in which the liquid benzene and silicone rubber are used as the carbon source and silicon oxycarbide (SiOC) source, respectively. The nano-morphologies of the nano-graphitic carbon coating with different conditions are characterized and analyzed, illustrating notable differences in surface features with the addition of silicone rubber and various growth durations. In the demonstration, the nano-graphitic carbon-coated Si mold inserts exhibit unique properties, including anti-adhesive and hydrophobic at elevated temperatures. Two kinds of micro-patterned Si mold inserts, a micro-pillar matrix and a micro-lens array, generated by UV lithography and diamond turning, are utilized to demonstrate the feasibility of the anti-adhesive coating in precision glass molding. The obtained results indicate that the micro-optical features on the coated Si mold inserts are successfully transferred to glass substrates with high replication fidelity without notable signs of adhesion or contamination in repetitive molding cycles. This emerging technology makes Si an alternative mold material with low surface adhesion, enhances micro-optical machining efficiency, and replicates high-precision, low-cost micro-optics on large scales that were previously unavailable.

ジャーナルSurface and Coatings Technology
出版ステータスPublished - 2022 10月 25

ASJC Scopus subject areas

  • 化学一般
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学


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