Study on sputtered a-Si:H for micro optical diffusion sensor using laser-induced dielectrophoresis

Makoto Kamata, Kan Yamada, Yoshihiro Taguchi, Yuji Nagasaka

研究成果: Conference contribution

1 被引用数 (Scopus)


In this study, a MEMS sensing device, which is applicable to point-of-care testing (POCT), is developed by integrating an optical manipulation and detection technique. The diffusion coefficient is a parameter, which is sensitive to the size, the construction and the interaction of the sample, thus, the measurement of the diffusion coefficient of the bio-sample, such as proteins, is useful for the clinical diagnosis to detect interactions and conformational changes with high sensitivity. Several diffusion sensing methods have been developed, however, the technique applicable to POCT is not established because of the difficulties due to the requirement of the measurement in a short time and a small sensing device. In this study, in order to realize a high-speed detection (ms ∼ s) with small sample volume (∼ μl) and small apparatus (tens of cm) without particular preparations, the micro optical diffusion sensor utilizing laser-induced dielectrophoresis (LIDEP), which is a manipulation technique based on optoelectronic tweezers, is developed. The microscale concentration distribution is formed in the microchannel by LIDEP and act as the transient diffraction grating, then, the diffusion phenomenon is optically observed. For these techniques, a photoconductive layer is essential and a hydrogenated amorphous silicon (a-Si:H) deposited by a plasma-enhanced chemical vapor deposition is generally utilized as the layer. In this study, the a-Si:H is deposited using a reactive RF magnetron sputtering method under several conditions, while changing the source gas compositions. The sensing device is fabricated with proposed a-Si:H, and the feasibility study for bio-sample measurement is conducted.

ホスト出版物のタイトルMOEMS and Miniaturized Systems XV
編集者Wibool Piyawattanametha, Yong-Hwa Park
出版ステータスPublished - 2016
イベントMOEMS and Miniaturized Systems XV - San Francisco, United States
継続期間: 2016 2月 152016 2月 17


名前Proceedings of SPIE - The International Society for Optical Engineering


OtherMOEMS and Miniaturized Systems XV
国/地域United States
CitySan Francisco

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学


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