Technological advances in super fine finishing

研究成果: Conference contribution

抄録

Focusing short wavelength radiations such as Extreme Ultra-Violet (EUV) and X-rays can be accomplished by assemblies of reflective aspheric optics. Application of such systems ranges from research in X-ray astronomy and microscopy, to semiconductors production by EUV lithography. But such optical surfaces require finishing to very low levels of micro-roughness, in proportion to the wavelength of incoming radiation. In this paper, recent advances in super fine finishing technologies (capable of achieving micro-roughness below 0.5 nm rms) for aspheric and freeform optical surfaces are presented. The paper deals with both ultra-precision grinding and polishing technologies, with the performance and advantages/disadvantages of each method being discussed, and examples of applications provided.

本文言語English
ホスト出版物のタイトルConference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
編集者R. Leach
出版社euspen
ページ21-39
ページ数19
ISBN(電子版)9780956679031
出版ステータスPublished - 2014
外部発表はい
イベント14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 - Dubrovnik, Croatia
継続期間: 2014 6月 22014 6月 6

出版物シリーズ

名前Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
1

Other

Other14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
国/地域Croatia
CityDubrovnik
Period14/6/214/6/6

ASJC Scopus subject areas

  • 産業および生産工学
  • 機械工学
  • 材料科学一般
  • 器械工学
  • 環境工学

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