@inproceedings{484504cc16d646b08bcbe99679ea5ee9,
title = "Technological advances in super fine finishing",
abstract = "Focusing short wavelength radiations such as Extreme Ultra-Violet (EUV) and X-rays can be accomplished by assemblies of reflective aspheric optics. Application of such systems ranges from research in X-ray astronomy and microscopy, to semiconductors production by EUV lithography. But such optical surfaces require finishing to very low levels of micro-roughness, in proportion to the wavelength of incoming radiation. In this paper, recent advances in super fine finishing technologies (capable of achieving micro-roughness below 0.5 nm rms) for aspheric and freeform optical surfaces are presented. The paper deals with both ultra-precision grinding and polishing technologies, with the performance and advantages/disadvantages of each method being discussed, and examples of applications provided.",
keywords = "EUV, Grinding, Polishing, Super-fine finishing, Ultra-precision, X-ray",
author = "Beaucamp, {A. T.H.} and Y. Namba",
year = "2014",
language = "English",
series = "Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014",
publisher = "euspen",
pages = "21--39",
editor = "R. Leach",
booktitle = "Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014",
note = "14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 ; Conference date: 02-06-2014 Through 06-06-2014",
}