TY - GEN
T1 - Three-dimensional photonic crystals fabricated by double-angled plasma etching
AU - Takahashi, Shigeki
AU - Nakamori, Takeshi
AU - Okano, Makoto
AU - Imada, Masahiro
AU - Noda, Susumu
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ∼90% reflectance and ∼10dB attenuation around the photonic bandgap wavelength region.
AB - Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ∼90% reflectance and ∼10dB attenuation around the photonic bandgap wavelength region.
UR - http://www.scopus.com/inward/record.url?scp=51549086185&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=51549086185&partnerID=8YFLogxK
U2 - 10.1109/QELS.2007.4431023
DO - 10.1109/QELS.2007.4431023
M3 - Conference contribution
AN - SCOPUS:51549086185
SN - 1557528349
SN - 9781557528346
T3 - Conference on Quantum Electronics and Laser Science (QELS) - Technical Digest Series
BT - 2007 Quantum Electronics and Laser Science Conference, QELS
T2 - 2007 Quantum Electronics and Laser Science Conference, QELS
Y2 - 6 May 2007 through 11 May 2007
ER -