TY - JOUR
T1 - Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films synthesized by the AIP method
AU - Hasegawa, Hiroyuki
AU - Kimura, Ayako
AU - Suzuki, Tetsuya
PY - 2000/10
Y1 - 2000/10
N2 - Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were synthesized by changing the contents, x values, using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti(1-x)Al(x)N films changed from the NaCl into wurtzite type at x = 0.6-0.7, while Ti(1-x)Cr(x)N and Ti(1-x)Zr(x)N kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti(1-x)Al(x)N and Ti(1-x)Cr(x)N monotonously decreased from 4.23 Å (x = 0) down to 4.17 Å (x = 0.6) and to 4.16 Å (x = 1.0), respectively. On the other hand, the lattice parameters of Ti(1-x)Zr(x)N films monotonously increased from 4.23 Å (x = 0) up to 4.58 Å (x = 1.0). The maximum micro-hardness of Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were Hv 3200 (x = 0.6), 3000 (x = 0.5) and 3000 (x = 0.2), respectively. (C) 2000 Published by Elsevier Science S.A. All rights reserved.
AB - Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were synthesized by changing the contents, x values, using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti(1-x)Al(x)N films changed from the NaCl into wurtzite type at x = 0.6-0.7, while Ti(1-x)Cr(x)N and Ti(1-x)Zr(x)N kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti(1-x)Al(x)N and Ti(1-x)Cr(x)N monotonously decreased from 4.23 Å (x = 0) down to 4.17 Å (x = 0.6) and to 4.16 Å (x = 1.0), respectively. On the other hand, the lattice parameters of Ti(1-x)Zr(x)N films monotonously increased from 4.23 Å (x = 0) up to 4.58 Å (x = 1.0). The maximum micro-hardness of Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were Hv 3200 (x = 0.6), 3000 (x = 0.5) and 3000 (x = 0.2), respectively. (C) 2000 Published by Elsevier Science S.A. All rights reserved.
KW - Arc ion plating
KW - Ti(1-x)Al(x)N
KW - Ti(1-x)Cr(x)N
KW - Ti(1-x)Zr(x)N
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UR - http://www.scopus.com/inward/citedby.url?scp=0034292472&partnerID=8YFLogxK
U2 - 10.1016/S0257-8972(00)00737-4
DO - 10.1016/S0257-8972(00)00737-4
M3 - Article
AN - SCOPUS:0034292472
SN - 0257-8972
VL - 132
SP - 76
EP - 79
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - 1
ER -