Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

A. Itoh; T. Makabe; N. Shimura; S. Tougo

doi:10.1109/27.491736

Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

A. Itoh, T. Makabe, N. Shimura, S. Tougo

研究成果: Article › 査読

16 被引用数 (Scopus)

抄録

Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

本文言語	English
ページ（範囲）	109-110
ページ数	2
ジャーナル	IEEE Transactions on Plasma Science
巻	24
号	1
DOI	https://doi.org/10.1109/27.491736
出版ステータス	Published - 1996
外部発表	はい

ASJC Scopus subject areas

核物理学および高エネルギー物理学
凝縮系物理学

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Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

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