## 抄録

Electron transport coefficients and the excitation, attachment and ionization rates in pure CF_{4} and in CF_{4}-Ar mixtures have been calculated for a set of cross-sections which was based on the work of Nakamura but which was modified to include more complex dissociation and ionization kinetics required to develop an adequate plasma chemical model. The procedure for the calculation was the direct numerical procedure (DNP) solution to the Boltzmann equation which makes no approximations in the number of terms used to represent the anisotropy of the distribution function in the velocity space. However, its accuracy may be limited by the density of the grid used. In this paper, we apply the DNP technique to establish its adequacy for plasma modelling in pure CF_{4} and in 5% CF_{4}-Ar mixture, as well as establishing the adequacy of the cross-section set that was used.

本文言語 | English |
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ページ（範囲） | 2146-2153 |

ページ数 | 8 |

ジャーナル | Journal of Physics D: Applied Physics |

巻 | 33 |

号 | 17 |

DOI | |

出版ステータス | Published - 2000 9月 7 |

## ASJC Scopus subject areas

- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- 音響学および超音波学
- 表面、皮膜および薄膜

## フィンガープリント

「Transport coefficients and scattering cross-sections for plasma modelling in CF_{4}-Ar mixtures: A swarm analysis」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。