Tunable metamaterials by controlling sub-micron gap for the THz range

Akihiro Isozaki; Tetsuo Kan; Hidetoshi Takahashi; Natsuki Kanda; Natsuki Nemoto; Kuniaki Konishi; Makoto Kuwata-Gonokami; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2014.6765868

Tunable metamaterials by controlling sub-micron gap for the THz range

Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial.

本文言語	English
ホスト出版物のタイトル	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	1221-1224
ページ数	4
ISBN（印刷版）	9781479935086
DOI	https://doi.org/10.1109/MEMSYS.2014.6765868
出版ステータス	Published - 2014 1月 1
外部発表	はい
イベント	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States 継続期間: 2014 1月 26 → 2014 1月 30

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
国/地域	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2014.6765868

他のファイルとリンク

引用スタイル

Isozaki, A., Kan, T., Takahashi, H., Kanda, N., Nemoto, N., Konishi, K., Kuwata-Gonokami, M., Matsumoto, K., & Shimoyama, I. (2014). Tunable metamaterials by controlling sub-micron gap for the THz range. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1221-1224). 記事 6765868 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765868

Tunable metamaterials by controlling sub-micron gap for the THz range. / Isozaki, Akihiro; Kan, Tetsuo; Takahashi, Hidetoshi その他.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1221-1224 6765868 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

研究成果: Conference contribution

Isozaki, A, Kan, T, Takahashi, H, Kanda, N, Nemoto, N, Konishi, K, Kuwata-Gonokami, M, Matsumoto, K & Shimoyama, I 2014, Tunable metamaterials by controlling sub-micron gap for the THz range. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765868, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1221-1224, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765868

Isozaki A, Kan T, Takahashi H, Kanda N, Nemoto N, Konishi K その他. Tunable metamaterials by controlling sub-micron gap for the THz range. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1221-1224. 6765868. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765868

Isozaki, Akihiro ; Kan, Tetsuo ; Takahashi, Hidetoshi その他. / Tunable metamaterials by controlling sub-micron gap for the THz range. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 1221-1224 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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Tunable metamaterials by controlling sub-micron gap for the THz range

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出版物シリーズ

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ASJC Scopus subject areas

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