Two-dimensional MEMS scanner for dual-axes confocal microscopy

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, Daesung Lee, Michael J. Mandella, Olav Solgaard

研究成果: Article査読

118 被引用数 (Scopus)


In this paper, we present a novel 2-D microelectromechanical systems (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution and long working distance, while also being well suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned vertical electrostatic combdrives. Maximum optical deflections of ±4.8 ° and ±5.5 ° are achieved in static mode for the outer and inner axes, respectively. Torsional resonant frequencies are at 500 Hz and 2.9 kHz for the outer and inner axes, respectively. The imaging capability of the MEMS scanner is successfully demonstrated in a breadboard setup. Reflectance images with a field of view of 344 μm × 417 μm are achieved at 8 frames/s. The transverse resolutions are 3.94 and 6.68 μm for the horizontal and vertical dimensions, respectively.

ジャーナルJournal of Microelectromechanical Systems
出版ステータスPublished - 2007 8月

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学


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