Two-dimensional self-consistent simulation of a DC magnetron discharge

Eiji Shidoji, Hiroto Ohtake, Nobuhiko Nakano, Toshiaki Makabe

研究成果: Article査読

60 被引用数 (Scopus)

抄録

A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

本文言語English
ページ(範囲)2131-2136
ページ数6
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
38
4 A
DOI
出版ステータスPublished - 1999

ASJC Scopus subject areas

  • 工学一般
  • 物理学および天文学一般

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