@inproceedings{1b9e9bc000e64bad9abeb99b3e9b7301,
title = "Ultraprecision machining of single-crystal silicon using a slow tool servo for infrared microlens arrays",
author = "Mao Mukaida and Jiwang Yan",
year = "2017",
language = "English",
booktitle = "ASPEN/ASPE Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications",
publisher = "Asian Society for Precision Engineering and Nanotechnology (ASPEN)/American Society for Precision Engineering (ASPE)",
note = "ASPEN/ASPE 2017 Spring Topical Meeting on Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications ; Conference date: 14-03-2017 Through 17-03-2017",
}