@article{c7ecf87760f04419bee2f7003eb11276,
title = "Ultraviolet-laser atom-probe tomographic three-dimensional atom-by-atom mapping of isotopically modulated Si nanoscopic layers",
abstract = "Using ultraviolet-laser assisted local-electrode atom-probe (UV-LEAP) tomography, we obtain three-dimensional (3D) atom-by-atom images of isotopically modulated S28 i and S 30 i ultrathin layers having thicknesses in the range of 5-30 nm. The 3D images display interfaces between the different monoisotopic layers with an interfacial width of ∼1.7 nm, thus demonstrating a significant improvement over isotope mapping achievable using secondary-ion mass-spectrometry or even visible laser-assisted atom-probe tomography. This sharpness is attributed to reduced thermal effects resulting from using a highly focused UV laser beam. Our findings demonstrate that UV-LEAP tomography provides the high accuracy needed to characterize, at the subnanometer scale, the emerging isotopically programmed nanomaterials.",
author = "Oussama Moutanabbir and Dieter Isheim and Seidman, {David N.} and Yoko Kawamura and Itoh, {Kohei M.}",
note = "Funding Information: O.M. acknowledges funding from the German Ministry of Education and Research (BMBF) under Contract Nos. 01BU0624 (CRYSGAN) and 13 N 9881 (DECISIF). This research was partially supported by the U.S.-Israel Binational Science Foundation (D.I. and D.N.S.). The LEAP tomograph was purchased with funding from the NSF-MRI and ONR-DURIP programs. The work at Keio has been supported in part by Special Coordination Funds for Promoting Science and Technology, in part by Grant-in-Aid for Scientific Research by MEXT, and a Grant-in-Aid for the Keio Global Center of Excellence for High-Level Global Cooperation.",
year = "2011",
month = jan,
day = "3",
doi = "10.1063/1.3531816",
language = "English",
volume = "98",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "1",
}