TY - GEN
T1 - Underwater Pitot Tube for Swimming Animals
AU - Hagiwara, T.
AU - Takahashi, H.
AU - Nguyen, T. V.
AU - Takahata, T.
AU - Shimoyama, I.
N1 - Funding Information:
The photolithography masks were made using the University of Tokyo VLSI Design and Education Center (VDEC)'s 8 inch EB writer F5112 + VD01 donated by ADVANTEST Corporation.
Publisher Copyright:
© 2019 IEEE.
PY - 2019/1
Y1 - 2019/1
N2 - This paper reports on an underwater Pitot tube which is designed for swimming measurement of marine animals. The tubes of the Pitot tube are filled with incompressive liquid and sealed by thin films so that the device can be used even when plunged into water. The Pitot tube has a pressure sensor inside that consists of a piezoresistive cantilever incorporated into a thin Parylene-C membrane. When a water flow is applied to the Pitot tube, the thin films at the inlets act as elastic membranes and the liquid filled in the tubes transmits the pressure to the pressure sensor. The proposed Pitot tube can be used as a water flow speedometer for biological studies of marine animals.
AB - This paper reports on an underwater Pitot tube which is designed for swimming measurement of marine animals. The tubes of the Pitot tube are filled with incompressive liquid and sealed by thin films so that the device can be used even when plunged into water. The Pitot tube has a pressure sensor inside that consists of a piezoresistive cantilever incorporated into a thin Parylene-C membrane. When a water flow is applied to the Pitot tube, the thin films at the inlets act as elastic membranes and the liquid filled in the tubes transmits the pressure to the pressure sensor. The proposed Pitot tube can be used as a water flow speedometer for biological studies of marine animals.
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U2 - 10.1109/MEMSYS.2019.8870691
DO - 10.1109/MEMSYS.2019.8870691
M3 - Conference contribution
AN - SCOPUS:85074352655
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 95
EP - 98
BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Y2 - 27 January 2019 through 31 January 2019
ER -