TY - GEN
T1 - Variable forgetting factor-based friction compensation method of precision stages
AU - Goka, Shigeki
AU - Hashimoto, Seiji
AU - Ohishi, Kiyoshi
AU - Ishikawa, Takeo
AU - Adachi, Shuichi
AU - Kosaka, Koji
AU - Kubota, Hiroshi
AU - Ohmi, Tadahiro
PY - 2006
Y1 - 2006
N2 - This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.
AB - This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.
KW - Adaptive identification
KW - Friction compensation
KW - Ultra-precision stage
KW - Variable forgetting factor
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U2 - 10.1109/SICE.2006.315007
DO - 10.1109/SICE.2006.315007
M3 - Conference contribution
AN - SCOPUS:34250695032
SN - 8995003855
SN - 9788995003855
T3 - 2006 SICE-ICASE International Joint Conference
SP - 3995
EP - 4000
BT - 2006 SICE-ICASE International Joint Conference
PB - Institute of Control Automation and Systems Engineers (ICASE)
T2 - 2006 SICE-ICASE International Joint Conference
Y2 - 18 October 2006 through 21 October 2006
ER -