We have succeeded in making peapod structures with vertically aligned multi-walled carbon nanotubes (MWNTs), grown on a silicon substrate using hot filament chemical vapor deposition. Opening the tips of the MWNTs was performed at 600°C using oxygen and then C60 molecules were deposited on them to fill their inner spaces. We confirmed that the MWNTs were open at the tips and filled with C60 molecules using transmission electron microscopy. In addition, it has been determined that MWNTs can be filled with other materials, such as molybdenum oxide.
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