抄録
This paper reports a Pitot tube type airflow sensor, which achieves both high sensitivity and water resistance. The proposed Pitot tube is composed of piezoresistive cantilevers as differential pressure sensing elements and nano-hole arrays as waterproof elements. The nano-hole arrays are attached to the air inlets, which are located the tip of the tube and sides of the sphere. When airflow is applied to the Pitot tube, air passes through the nano-hole arrays, and differential pressure between two inlets acts on the piezoresistive cantilevers. On the other hand, when locating in water, the nano-hole arrays protect the water penetration into the tube. The Pitot tube will be used for the airspeed measurement of flying marine birds.
| 本文言語 | English |
|---|---|
| ホスト出版物のタイトル | 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 |
| 出版社 | Institute of Electrical and Electronics Engineers Inc. |
| ページ | 214-217 |
| ページ数 | 4 |
| ISBN（電子版） | 9781538647820 |
| DOI | |
| 出版ステータス | Published - 2018 4月 24 |
| 外部発表 | はい |
| イベント | 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom 継続期間: 2018 1月 21 → 2018 1月 25 |
出版物シリーズ
| 名前 | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| 巻 | 2018-January |
| ISSN（印刷版） | 1084-6999 |
Other
| Other | 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 |
|---|---|
| 国/地域 | United Kingdom |
| City | Belfast |
| Period | 18/1/21 → 18/1/25 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- 機械工学
- 電子工学および電気工学
UN SDG
この成果は、次の持続可能な開発目標に貢献しています
