Workshop on atomic and molecular collision data for plasma modelling: Database needs for semiconductor plasma processing

Physics & Astronomy

• semiconductor plasmas 100%
• molecular collisions 91%
• atomic collisions 86%
• vapor phases 20%
• plasma etching 14%
• charging 12%
• manufacturing 10%
• etching 9%
• fabrication 7%
• molecules 7%
• gases 6%
• ions 6%