Terajima, M., Sato, S., Kato-Negishi, M. &
Onoe, H.,
2026,
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc.,
p. 556-559 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
研究成果: Conference contribution